Publications

Photoresist Use in Semiconductor Manufacturing

In series:Series on Emission Scenario Documentsview more titles

Published on September 03, 2014

book

This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry. The document presents standard approaches for estimating environmental releases of and occupational exposures to additives and components used in photoresist formulations.